发明申请
US20060262157A1 Method of manufacturing inkjet printhead using crosslinked polymer
审中-公开
使用交联聚合物制造喷墨打印头的方法
- 专利标题: Method of manufacturing inkjet printhead using crosslinked polymer
- 专利标题(中): 使用交联聚合物制造喷墨打印头的方法
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申请号: US11415198申请日: 2006-05-02
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公开(公告)号: US20060262157A1公开(公告)日: 2006-11-23
- 发明人: Byung-ha Park , Young-ung Ha , Sung-joon Park , Jae-sik Min , Kyong-il Kim
- 申请人: Byung-ha Park , Young-ung Ha , Sung-joon Park , Jae-sik Min , Kyong-il Kim
- 优先权: KR2005-39712 20050512
- 主分类号: B41J2/015
- IPC分类号: B41J2/015 ; G01D15/00
摘要:
A method of manufacturing an inkjet printhead includes preparing a substrate having a heater to hear ink and an electrode to supply current to the heater, applying a crosslinked polymer resist composition to the substrate having the heater and the electrode and patterning the same, and forming a passage forming layer that surrounds an ink passage, patterning the substrate having the passage forming layer by photolithography at least twice, and forming a sacrificial layer having a planarized top surface in a space surrounded by the passage forming layer, applying the crosslinked polymer resist composition to the passage forming layer and the sacrificial layer and patterning the same, and forming a nozzle layer having a nozzle, etching the substrate from the bottom surface thereof to be perforated, and forming an ink supply hole, and removing the sacrificial layer, wherein the crosslinked polymer resist composition comprises a precursor polymer that is a phenolic novolak resin having glycidyl ether functional groups on repeating monomer units.
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