A turbo vacuum pump 1 of the present invention comprises a suction part 23A for sucking gas in an axial direction; a discharge section 50 in which rotating impellers 70, 24 and stationary impellers 71, 28 are alternately arranged; a rotating shaft 21 for rotating said rotating impellers 70, 24; a turbine impeller part 73 fixed to the suction part side end face 15 of said rotating shaft 21; said rotating impellers 70,24 including one or more turbine impellers 70 for discharging said sucked gas in said axial direction, and one or more centrifugal impellers 24, located downstream of said one or more turbine impellers 70, for further discharging said discharged gas by a centrifugal drag effect; and said one or more centrifugal impellers 24 being fixed to said rotating shaft 21 passing therethrough; said one or more turbine impellers 70 being included in said turbine impeller part 73.