Invention Application
- Patent Title: Electroactive polymers for lithography
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Application No.: US11132736Application Date: 2005-05-19
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Publication No.: US20060264015A1Publication Date: 2006-11-23
- Inventor: Roderick Hyde , Nathan Myhrvold
- Applicant: Roderick Hyde , Nathan Myhrvold
- Assignee: Searete LLC, a limited liability corporation of the State of Delaware
- Current Assignee: Searete LLC, a limited liability corporation of the State of Delaware
- Main IPC: G03F1/00
- IPC: G03F1/00 ; H01L21/22
Abstract:
Systems and methods for lithography include actuating an electroactive polymer member to position mask and/or substrate.
Public/Granted literature
- US07473499B2 Electroactive polymers for lithography Public/Granted day:2009-01-06
Information query
