- 专利标题: Position detection apparatus and exposure apparatus
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申请号: US11498747申请日: 2006-08-04
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公开(公告)号: US20060269122A1公开(公告)日: 2006-11-30
- 发明人: Hiroshi Tanaka
- 申请人: Hiroshi Tanaka
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP11-062004 19990309
- 主分类号: G06K9/00
- IPC分类号: G06K9/00
摘要:
An exposure apparatus for exposing an object to light. The apparatus includes a camera which captures an image of a mark on the object to obtain image data corresponding to the image, an extraction section which extracts an edge position in the image data obtained by differentiating the image data, a determination section which determines a position of the mark by comparing the extracted edge position with a template, and a control section which changes at least one of a parameter used by the extraction section and a parameter used by the determination section, based on a result of the comparing by the determination section. The object to be exposed is positioned based upon the position of the mark determined by the determination section.
公开/授权文献
- US07590280B2 Position detection apparatus and exposure apparatus 公开/授权日:2009-09-15