发明申请
US20060271225A1 METHOD AND SYSTEM FOR ADVANCED PROCESS CONTROL INCLUDING TOOL DEPENDENT MACHINE CONSTANTS
有权
用于高级工艺控制的方法和系统，包括工具依赖机器常数
- 专利标题： METHOD AND SYSTEM FOR ADVANCED PROCESS CONTROL INCLUDING TOOL DEPENDENT MACHINE CONSTANTS
- 专利标题（中）： 用于高级工艺控制的方法和系统，包括工具依赖机器常数
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申请号： US11379092申请日： 2006-04-18
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公开(公告)号： US20060271225A1公开(公告)日： 2006-11-30
- 发明人: Uwe Schulze , Uwe Knappe
- 申请人： Uwe Schulze , Uwe Knappe
- 优先权： DE102005024915.9 20050531
- 主分类号： G06F19/00
- IPC分类号： G06F19/00
摘要：
A controller and a method of controlling a process tool is provided, in which machine constants used for calibrating manipulated variables of the control algorithm are explicitly introduced into the process model, thereby providing an enhanced controller behavior immediately after the introduction of new measurement values of the machine constants.
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