发明申请
US20060275697A1 Top coating composition for photoresist and method of forming photoresist pattern using the same
审中-公开
用于光致抗蚀剂的顶涂层组合物和使用其形成光刻胶图案的方法
- 专利标题: Top coating composition for photoresist and method of forming photoresist pattern using the same
- 专利标题(中): 用于光致抗蚀剂的顶涂层组合物和使用其形成光刻胶图案的方法
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申请号: US11364707申请日: 2006-02-27
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公开(公告)号: US20060275697A1公开(公告)日: 2006-12-07
- 发明人: Mitsuhiro Hata , Man-Hyoung Ryoo , Hyun-Woo Kim , Sang-Gyun Woo , Jin-Young Yoon , Jung-Hwan Hah
- 申请人: Mitsuhiro Hata , Man-Hyoung Ryoo , Hyun-Woo Kim , Sang-Gyun Woo , Jin-Young Yoon , Jung-Hwan Hah
- 优先权: KR2005-48111 20050604
- 主分类号: G03C1/00
- IPC分类号: G03C1/00
摘要:
Provided are a top coating composition for a photoresist which can be used in immersion lithography, and a method of forming a photoresist pattern using the same. The top coating composition includes: a polymer including at least three different structural repeating units including a first repeating unit comprising a carboxy group substituted by an alkyl protecting group or an acid-labile group, a second repeating unit comprising an acid group, and a third repeating unit comprising a polar group, and an organic solvent comprising an alcohol.
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