发明申请
US20060276053A1 Spin-on glass composition, method of preparing the spin-on glass composition and method of forming a porous silicon oxide layer using the spin-on glass composition
失效
旋涂玻璃组合物，旋涂玻璃组合物的制备方法和使用旋涂玻璃组合物形成多孔氧化硅层的方法
- 专利标题： Spin-on glass composition, method of preparing the spin-on glass composition and method of forming a porous silicon oxide layer using the spin-on glass composition
- 专利标题（中）： 旋涂玻璃组合物，旋涂玻璃组合物的制备方法和使用旋涂玻璃组合物形成多孔氧化硅层的方法
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申请号： US11446152申请日： 2006-06-05
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公开(公告)号： US20060276053A1公开(公告)日： 2006-12-07
- 发明人: Jun-Hyun Cho , Jung-Sik Choi , Jung-Ho Lee , Mi-Ae Kim
- 申请人： Jun-Hyun Cho , Jung-Sik Choi , Jung-Ho Lee , Mi-Ae Kim
- 优先权： KR2005-48147 20050607
- 主分类号： H01L23/58
- IPC分类号： H01L23/58 ; H01L21/31
摘要：
A spin-on glass composition includes a solvent, about 3 to about 20 percent by weight of a porogen, and about 3 to about 20 percent by weight of a silsesquioxane oligomer represented by formula (1), where, in the formula (1), Y1 and Y2 independently represent a hydrolyzable alkoxy group, R represents a lower alkyl group, and n and m independently represent an integer in a range of one to nine both inclusive.
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