发明申请
- 专利标题: Electric field sensor with electrode interleaving vibration
- 专利标题(中): 电场传感器具有电极交错振动
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申请号: US11446781申请日: 2006-06-05
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公开(公告)号: US20060279271A1公开(公告)日: 2006-12-14
- 发明人: Shanhong Xia , Chao Ye , Chao Gong , Xianxiang Chen , Qiang Bai , Shaofeng Chen
- 申请人: Shanhong Xia , Chao Ye , Chao Gong , Xianxiang Chen , Qiang Bai , Shaofeng Chen
- 优先权: CN200510011895.X 20050609
- 主分类号: G01N27/00
- IPC分类号: G01N27/00
摘要:
An electric field sensor comprising: a substrate having a hole; a shielding electrode and a sensing electrode, disposed in the hole of the substrate; a piezoelectric bar having one end connected to the center of the shielding electrode, the other end fixed on the substrate. Present invention provides several electric field sensors, which have the same feature of utilizing electrodes interleaving vibration to modulate external electric field. They have IC-compatible operation voltage and small volume.
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