发明申请
US20060282187A1 SYSTEM FOR DISPATCHING SEMICONDUCTORS LOTS 有权
分配半导体器件的系统

SYSTEM FOR DISPATCHING SEMICONDUCTORS LOTS
摘要:
A system for dispatching a plurality of semiconductor lots among a plurality of tools is provided. The system includes a dispatch server manager and a dispatch integrator and display device. The dispatch integrator and display device conveys a dispatch request to the manager and receives a dispatch list from the manager. The manager queries for a processing status of the plurality of semiconductor lots and displays a dispatch list in response to the processing status. The dispatch list includes an associated reason and/or code related to the processing status.
公开/授权文献
信息查询
0/0