发明申请
- 专利标题: SYSTEM FOR DISPATCHING SEMICONDUCTORS LOTS
- 专利标题(中): 分配半导体器件的系统
-
申请号: US11307288申请日: 2006-01-31
-
公开(公告)号: US20060282187A1公开(公告)日: 2006-12-14
- 发明人: Eric Dickstein , Alan Dziedzic , Richard Burda
- 申请人: Eric Dickstein , Alan Dziedzic , Richard Burda
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: G06F19/00
- IPC分类号: G06F19/00
摘要:
A system for dispatching a plurality of semiconductor lots among a plurality of tools is provided. The system includes a dispatch server manager and a dispatch integrator and display device. The dispatch integrator and display device conveys a dispatch request to the manager and receives a dispatch list from the manager. The manager queries for a processing status of the plurality of semiconductor lots and displays a dispatch list in response to the processing status. The dispatch list includes an associated reason and/or code related to the processing status.
公开/授权文献
- US07426420B2 System for dispatching semiconductors lots 公开/授权日:2008-09-16
信息查询