发明申请
US20060288789A1 Micromechanical pressure sensor element and method for using a pressure sensor element of this type
失效
微机械压力传感器元件和使用这种压力传感器元件的方法
- 专利标题: Micromechanical pressure sensor element and method for using a pressure sensor element of this type
- 专利标题(中): 微机械压力传感器元件和使用这种压力传感器元件的方法
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申请号: US11472106申请日: 2006-06-20
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公开(公告)号: US20060288789A1公开(公告)日: 2006-12-28
- 发明人: Dirk Ullmann
- 申请人: Dirk Ullmann
- 优先权: DE102005029097.3 20050623
- 主分类号: G01L9/00
- IPC分类号: G01L9/00
摘要:
A micromechanical pressure sensor element, in particular for tire pressure measurement. The device has at least: a layer system having a diaphragm underneath which a cavity is formed, which is separated from an external space outside the pressure sensor element; a measuring device for measuring a deflection of the diaphragm; and a seismic mass formed on, underneath, or in the diaphragm. Furthermore, in a method for using such a pressure sensor element, the pressure sensor element is operatable in a sleep mode having lower power consumption and in an operating mode having higher power consumption; in the sleep mode a change in the measuring signals of the measuring device over time is checked, and if a relevant change in the measuring signals is detected, a position change is inferred and a switchover to the operating mode is performed, in which the measuring signals of the measuring device or the analysis signals formed from the measuring signals are transmitted via a transmitter, for example, an antenna.
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