发明申请
US20060288932A1 Circuit pattern forming device and circuit pattern forming method
有权
电路图案形成装置及电路图案形成方法
- 专利标题: Circuit pattern forming device and circuit pattern forming method
- 专利标题(中): 电路图案形成装置及电路图案形成方法
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申请号: US11455637申请日: 2006-06-20
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公开(公告)号: US20060288932A1公开(公告)日: 2006-12-28
- 发明人: Takashi Mori , Yuji Tsuruoka , Masao Furukawa , Seiichi Kamiya , Nobuhito Yamaguchi
- 申请人: Takashi Mori , Yuji Tsuruoka , Masao Furukawa , Seiichi Kamiya , Nobuhito Yamaguchi
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2005-181625 20050622
- 主分类号: B05C5/00
- IPC分类号: B05C5/00 ; H01L21/20 ; H01L21/31
摘要:
The present invention is intended to provide a highly reliable circuit pattern forming device which can cause a conductive solution to land on the substrate with high precision and which, when forming a multilayer printed circuit board, prevents closely arranged wires from becoming short-circuited. To realize this objective, this invention forms a circuit pattern by ejecting onto the substrate the droplets of insulating solution and the droplets of conductive solution while moving the liquid ejection unit and the substrate relative to each other. During this process, when both of the droplets are landed close together on the substrate, the droplets of insulating solution are made to land on the substrate prior to the droplets of conductive solution.
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