- 专利标题: Polarization-modulating optical element
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申请号: US11440479申请日: 2006-05-25
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公开(公告)号: US20060291057A1公开(公告)日: 2006-12-28
- 发明人: Damian Fiolka , Markus Deguenther
- 申请人: Damian Fiolka , Markus Deguenther
- 主分类号: G02B27/28
- IPC分类号: G02B27/28
摘要:
The invention relates to a projection system, comprising a radiation source, an illumination system operable to illuminate a structured mask, and a projection objective for projecting an image of the mask structure onto a light-sensitive substrate, wherein said projection system comprises an optical system comprising an optical axis or a preferred direction given by the direction of a light beam propagating through the optical system; the optical system comprising a temperature compensated polarization-modulating optical element described by coordinates of a coordinate system, wherein one preferred coordinate of the coordinate system is parallel to the optical axis or parallel to said preferred direction; said temperature compensated polarization-modulating optical element comprising a first and a second polarization-modulating optical element, the first and/or the second polarization-modulating optical element comprising solid and/or liquid optically active material and a profile of effective optical thickness, wherein the effective optical thickness varies at least as a function of one coordinate different from the preferred coordinate of the coordinate system, in addition or alternative the first and/or the second polarization-modulating optical element comprises solid and/or liquid optically active material, wherein the effective optical thickness is constant as a function of at least one coordinate different from the preferred coordinate of the coordinate system; wherein the first polarization-modulating optical element comprises optically active material with a specific rotation of opposite sign compared to the optically active material of the second polarization-modulating optical element.
公开/授权文献
- US08270077B2 Polarization-modulating optical element 公开/授权日:2012-09-18