发明申请
- 专利标题： Processing method and device
- 专利标题（中）： 处理方法和装置
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申请号： US10539246申请日： 2003-12-17
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公开(公告)号： US20070004051A1公开(公告)日： 2007-01-04
- 发明人: Yasuhiro Okumoto , Wataru Karasawa
- 申请人： Yasuhiro Okumoto , Wataru Karasawa
- 优先权： JP20002-365777 20021217
- 国际申请： PCT/JP03/16199 WO 20031217
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
A processing system has a processing section for continuously processing a member to be processed; an inspection section for inspecting a processed state of the member processed by the processing section; a processed state determination section for determining whether the processed state is defective/nondefective, on the basis of a result of inspection performed by the inspection section; a continuity determination section for determining whether or not a defective determination is continuously made when the processed state is determined to be defective by the processed state determination section; and a processing control section for controlling processing so as to stop processing of the member continuously performed by the processing section when the continuity determination section determines that the defective determination is continuously made.