发明申请
- 专利标题: METHOD OF MANUFACTURING LIQUID CRYSTAL DISPLAY DEVICE
- 专利标题(中): 制造液晶显示装置的方法
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申请号: US11425259申请日: 2006-06-20
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公开(公告)号: US20070009813A1公开(公告)日: 2007-01-11
- 发明人: Yasuo FUJITA
- 申请人: Yasuo FUJITA
- 申请人地址: JP Chiyoda-ku
- 专利权人: MITSUBISHI DENKI KABUSHIKI KAISHA
- 当前专利权人: MITSUBISHI DENKI KABUSHIKI KAISHA
- 当前专利权人地址: JP Chiyoda-ku
- 优先权: JP2005-195722 20050705
- 主分类号: G03F9/00
- IPC分类号: G03F9/00
摘要:
A plurality of display areas are formed on an array substrate by stepper exposure. The array substrate is divided into array shot areas serving as shot units at the time of divided exposure. One display area is divided into four array shot areas. One array shot area is provided with at least one alignment mark. The array substrate has a rectangular shape, and is provided with a superimposition mark at the corner thereof which is used as the reference for superimposing the array substrate and a CF substrate.
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