发明申请
- 专利标题： Carrier employing snap-fitted membrane retainer
- 专利标题（中）： 载体采用卡扣式膜保持器
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申请号： US11175855申请日： 2005-07-06
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公开(公告)号： US20070010180A1公开(公告)日： 2007-01-11
- 发明人: Andres Garcia , Frank Miceli , Jose Rodriguez , Margareth Seputro , Charles Storey
- 申请人： Andres Garcia , Frank Miceli , Jose Rodriguez , Margareth Seputro , Charles Storey
- 专利权人： Agere Systems, Inc.
- 当前专利权人： Agere Systems, Inc.
- 主分类号： B24B41/06
- IPC分类号： B24B41/06
摘要：
Disclosed herein is an improved carrier design for use in a chemical mechanical polishing process. The carrier employs a retainer ring that is fastened to the side of carrier, as opposed to the front of the carrier, which alleviates undesired uneven wear of the retainer ring surface. Specifically exemplified herein is a carrier comprising a membrane that is secured to the carrier body by a retainer ring that is snap-fitted to the carrier body.
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