发明申请
US20070012099A1 Vacuum line and a method of monitoring such a line 有权
真空管线和监控这种管线的方法

  • 专利标题: Vacuum line and a method of monitoring such a line
  • 专利标题(中): 真空管线和监控这种管线的方法
  • 申请号: US11477361
    申请日: 2006-06-30
  • 公开(公告)号: US20070012099A1
    公开(公告)日: 2007-01-18
  • 发明人: Nicolas Becourt
  • 申请人: Nicolas Becourt
  • 专利权人: ALCATEL
  • 当前专利权人: ALCATEL
  • 优先权: FR0552027 20050704
  • 主分类号: F04B51/00
  • IPC分类号: F04B51/00 G01M19/00
Vacuum line and a method of monitoring such a line
摘要:
The present invention provides a vacuum line for pumping gas from a process chamber, the vacuum line comprising at least: a pump unit comprising a pump body and a motor; a gas exhaust system; first measurement means for measuring a functional parameter relating to the motor; second measurement means for measuring a functional parameter relating to the exhaust system; and prediction means for calculating the duration of use of the vacuum line. The prediction means calculate the duration of utilization of the vacuum line prior to failure of the pump unit from the measurement of a functional parameter relating to the motor provided by the first means and the measurement of a functional parameter relating to the exhaust system provided by the second means. In a variant, the vacuum line further includes third measurement means for measuring a functional parameter relating to the pump body, and the prediction means calculate the duration of use while taking account of the measurement of this parameter.
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