- 专利标题: Methods of forming conductive contacts to source/drain regions and methods of forming local interconnects
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申请号: US11525707申请日: 2006-09-21
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公开(公告)号: US20070015358A1公开(公告)日: 2007-01-18
- 发明人: Cem Basceri , Gurtej Sandhu , H. Manning
- 申请人: Cem Basceri , Gurtej Sandhu , H. Manning
- 主分类号: H01L21/44
- IPC分类号: H01L21/44
摘要:
The invention comprises methods of forming a conductive contact to a source/drain region of a field effect transistor, and methods of forming local interconnects. In one implementation, a method of forming a conductive contact to a source/drain region of a field effect transistor includes providing gate dielectric material intermediate a transistor gate and a channel region of a field effect transistor. At least some of the gate dielectric material extends to be received over at least one source/drain region of the field effect transistor. The gate dielectric material received over the one source/drain region is exposed to conditions effective to change it from being electrically insulative to being electrically conductive and in conductive contact with the one source/drain region. Other aspects and implementations are contemplated.
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