发明申请
- 专利标题： Resonant structure humidity sensor
- 专利标题（中）： 谐振结构湿度传感器
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申请号： US11185406申请日： 2005-07-20
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公开(公告)号： US20070017276A1公开(公告)日： 2007-01-25
- 发明人: William Trutna , Richard Ruby , Storrs Hoen , Annette Grot , Mark Unkrich , Graham Flower , John Kofol
- 申请人： William Trutna , Richard Ruby , Storrs Hoen , Annette Grot , Mark Unkrich , Graham Flower , John Kofol
- 主分类号： G01N7/00
- IPC分类号： G01N7/00
摘要：
A humidity sensor that includes a resonant structure and a structure for altering a resonant frequency of the resonant structure in response to a change in humidity. The structures of a humidity sensor according to the present teachings may be formed in relatively small form factors and are well suited to remote applications and providing mechanisms for compensating for temperature drift.
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