发明申请
US20070018278A1 Semiconductor memory device 审中-公开
半导体存储器件

  • 专利标题: Semiconductor memory device
  • 专利标题(中): 半导体存储器件
  • 申请号: US11189098
    申请日: 2005-07-25
  • 公开(公告)号: US20070018278A1
    公开(公告)日: 2007-01-25
  • 发明人: Michael KundJosef Willer
  • 申请人: Michael KundJosef Willer
  • 主分类号: H01L29/00
  • IPC分类号: H01L29/00
Semiconductor memory device
摘要:
The channel regions (T) of the memory cells are directed transversly to the word lines (2), which are arranged parallel at a distance from one another. Local interconnects (6) connect the source/drain regions of the memory cell transistors to bit lines running across the word lines and are connected to local interconnects in every next but one interspace between neighboring word lines. Every local interconnect is connected to only one source/drain region, which is enabled by enlarged shallow trench isolations (7) between the active areas. This memory cell array allows an individual programming and erasing of every single cell and can be integrated with a flash memory array comprising local interconnects and upper bit lines and is intended for file storage.
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