发明申请
US20070020564A1 Method for manufacturing photoresist having nanoparticles 有权
制造具有纳米颗粒的光致抗蚀剂的方法

  • 专利标题: Method for manufacturing photoresist having nanoparticles
  • 专利标题(中): 制造具有纳米颗粒的光致抗蚀剂的方法
  • 申请号: US11492283
    申请日: 2006-07-24
  • 公开(公告)号: US20070020564A1
    公开(公告)日: 2007-01-25
  • 发明人: MeiLing Wu
  • 申请人: MeiLing Wu
  • 专利权人: INNOLUX DISPLAY CORP.
  • 当前专利权人: INNOLUX DISPLAY CORP.
  • 优先权: CN200510036146.2 20050722
  • 主分类号: G03C5/00
  • IPC分类号: G03C5/00
Method for manufacturing photoresist having nanoparticles
摘要:
An exemplary method for manufacturing photoresist includes the steps of: adding a metal salt into an aqueous solution, whereby the aqueous solution contains metallic ions (211); adding a sulfide containing sulfur ions (231) into the aqueous solution; adding a polymerizable surfactant (220) into the aqueous solution thereby forming metallic ion reverse micelles (210) and sulfur ion reverse micelles (230); reacting the metallic ion reverse micelles and the sulfur ion reverse micelles to create monomeric sulfureted metal nanoparticle reverse micelles (240); aggregating the monomeric sulfureted metal nanoparticle reverse micelles to polymeric macromolecular nanoparticles; and doping the polymeric macromolecules nanoparticles into a base material in order to obtain the photoresist having sulfureted metal nanoparticles. A diameter of the nanoparticles is in the range from 1×10−9 meters to 1×10−7 meters.
公开/授权文献
信息查询
0/0