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发明申请
US20070022815A1 METHOD OF INSPECTING A SUBSTRATE USING ULTRASONIC WAVES AND APPARATUS FOR PERFORMING THE SAME 有权
使用超声波检测基板的方法及其实施方法

METHOD OF INSPECTING A SUBSTRATE USING ULTRASONIC WAVES AND APPARATUS FOR PERFORMING THE SAME
摘要：
A method of inspecting a substrate is provided comprising applying ultrasonic waves to a substrate, receiving echo pulse signals transmitted through the substrate, and analyzing received echo pulse signals to detect defects in the substrate. Thus, defects in the substrate may be detected.
摘要（中）：

提供一种检查基板的方法，包括向基板施加超声波，接收通过基板传输的回波脉冲信号，以及分析接收到的回波脉冲信号以检测基板中的缺陷。 因此，可以检测衬底中的缺陷。

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