发明申请
- 专利标题: PINNING LAYER FOR PIXEL SENSOR CELL AND METHOD THEREOF
- 专利标题(中): 用于像素传感器单元的密封层及其方法
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申请号: US11161224申请日: 2005-07-27
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公开(公告)号: US20070023796A1公开(公告)日: 2007-02-01
- 发明人: James Adkisson , John Ellis-Monaghan
- 申请人: James Adkisson , John Ellis-Monaghan
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L31/113
- IPC分类号: H01L31/113 ; H01L31/062
摘要:
A novel pixel sensor cell structure and method of manufacture. The pixel sensor cell includes a collection well region of a first conductivity type and a pinning layer formed in a substrate. The pinning layer includes a first impurity region of a second conductivity type and a second impurity region of the second conductivity type. The first and second impurity regions can be independently formed to affect multiple parameters of the pixel sensor cell.
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