发明申请
- 专利标题: MEMS pixel sensor
- 专利标题(中): MEMS像素传感器
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申请号: US11516473申请日: 2006-09-06
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公开(公告)号: US20070023851A1公开(公告)日: 2007-02-01
- 发明人: John Hartzell , Changqing Zhan , Michael Wolfson
- 申请人: John Hartzell , Changqing Zhan , Michael Wolfson
- 主分类号: H01L29/66
- IPC分类号: H01L29/66
摘要:
A MEMS pixel sensor is provided with a thin-film mechanical device having a mechanical body, with a mechanical state responsive to a proximate environment. A thin-film electronic device converts the mechanical state into electrical signals. A pixel interface supplies power to the electronic device and transceives electrical signals. The sensor is able to operate dynamically, in real-time. For example, if the mechanical device undergoes a sequence of mechanical states at a corresponding plurality of times, the electronic device is able to supply a sequence of electrical signals to the pixel interface that are responsive to the sequence of mechanical states, at the plurality of times. Each MEMS pixel sensor may include a number of mechanical devices, and corresponding electronic devices, to provide redundancy or to measure a broadband response range.
公开/授权文献
- US07425749B2 MEMS pixel sensor 公开/授权日:2008-09-16
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