Invention Application
US20070024178A1 Field emission device having insulated column lines and method of manufacture 审中-公开
具有绝缘柱线的场发射装置及其制造方法

  • Patent Title: Field emission device having insulated column lines and method of manufacture
  • Patent Title (中): 具有绝缘柱线的场发射装置及其制造方法
  • Application No.: US11519984
    Application Date: 2006-09-12
  • Publication No.: US20070024178A1
    Publication Date: 2007-02-01
  • Inventor: Ammar Derraa
  • Applicant: Ammar Derraa
  • Main IPC: H01J63/04
  • IPC: H01J63/04
Field emission device having insulated column lines and method of manufacture
Abstract:
An FED and a method of manufacture are provided. The FED includes a cathode assembly containing an improved column line structure. The column line structure includes a conductive structure formed on a substrate. A resistive layer is formed on the conductive structure, and an insulator layer is formed partly over the resistive layer. The contact between the base of the emitter tips and the addressing column line is achieved through a lateral side that is not covered by the insulator layer. The insulator layer helps reduce the possibility of electrical shorting between the addressing column line and the row line structure of the cathode assembly. The insulator layer on top of the addressing column line will allow the use of a thinner subsequent dielectric layer. This thinner dielectric layer, which supports the grid, will provide a lower RC time constant and help achieve better video rate operation. The thinner dielectric layer also will result in smaller grid openings above the tips. This will provide for better beam spots, and, therefore, better image resolution. The thinner dielectric layer will require less applied voltage to extract electrons from the tips, resulting in lower power consumption for the FED.
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