Invention Application
- Patent Title: RF MEMS switch having asymmetrical spring rigidity
- Patent Title (中): RF MEMS开关具有不对称的弹簧刚度
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Application No.: US11385700Application Date: 2006-03-22
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Publication No.: US20070024401A1Publication Date: 2007-02-01
- Inventor: Jun-o Kim , Sang-wook Kwon , Che-heung Kim , Jong-seok Kim , Hee-moon Jeong , Young-tack Hong , Sang-hun Lee
- Applicant: Jun-o Kim , Sang-wook Kwon , Che-heung Kim , Jong-seok Kim , Hee-moon Jeong , Young-tack Hong , Sang-hun Lee
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Priority: KR2005-0068213 20050727
- Main IPC: H01P1/10
- IPC: H01P1/10

Abstract:
An RF MEMS switch having asymmetrical spring rigidity. The RF MEMS switch has supporting members spaced apart in a certain interval on a substrate, a membrane being a motion member suspended by plural spring members extended on both sides of the membrane, and a bottom electrode being a contact surface on an upper surface of the substrate facing a bottom surface of the membrane, wherein the plural spring members placed on opposite sides of the membrane have asymmetrical rigidity, and a portion of the membrane on a side of stronger spring rigidity is first separated from the contact surface when the RF MEMS switch is turned off. The present invention has an advantage of easy separation of the switch from the contact surface, when the switch is turned off, due to the different rigidity of the springs located on the sides of the membrane.
Public/Granted literature
- US07420444B2 RF MEMS switch having asymmetrical spring rigidity Public/Granted day:2008-09-02
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