发明申请
- 专利标题: Method of manufacturing an electronic device
- 专利标题(中): 制造电子装置的方法
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申请号: US11583276申请日: 2006-10-18
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公开(公告)号: US20070037411A1公开(公告)日: 2007-02-15
- 发明人: Abraham Balkenende , Femke De Theije , Jan Kriege
- 申请人: Abraham Balkenende , Femke De Theije , Jan Kriege
- 申请人地址: NL Eindhoven
- 专利权人: Koninklijke Philips Electronics, N.V.
- 当前专利权人: Koninklijke Philips Electronics, N.V.
- 当前专利权人地址: NL Eindhoven
- 优先权: EP01203536.6 20010917; EP02076262.1 20020328
- 主分类号: H01L21/4757
- IPC分类号: H01L21/4757
摘要:
The electronic device with a layer of mesoporous silica can be obtained by applying a composition comprising alkoxysilane, a surfactant and a solvent onto a substrate, and by subsequently removing the surfactant and the solvent. The customary dehydroxylation treatment is not necessary if the composition contains a mixture of tetra-alkoxysilane, particularly teatraethoxyorthosilicate (TEOS), and an alkyl-substituted alkoxysilane, particularly a phenyl-substituted, methyl-substituted or ethyl-substituted trialkoxysilane. If both silanes are present in a molar ratio of approximately 1:1, a layer with a dielectric constant of 2.5 or less is obtained.
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