发明申请
US20070040547A1 MEMS based current sensor using magnetic-to-mechanical conversion and reference components
有权
基于MEMS的电流传感器采用磁 - 机转换和参考元件
- 专利标题： MEMS based current sensor using magnetic-to-mechanical conversion and reference components
- 专利标题（中）： 基于MEMS的电流传感器采用磁 - 机转换和参考元件
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申请号： US11506988申请日： 2006-08-18
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公开(公告)号： US20070040547A1公开(公告)日： 2007-02-22
- 发明人: Ertugrul Berkcan , Christopher Kapusta , Glenn Claydon , Anis Zribi , Laura Meyer , Wei-Cheng Tian
- 申请人： Ertugrul Berkcan , Christopher Kapusta , Glenn Claydon , Anis Zribi , Laura Meyer , Wei-Cheng Tian
- 主分类号： G01R1/20
- IPC分类号： G01R1/20
摘要：
A micro-electromechanical system (MEMS) current sensor is described as including a first conductor, a magnetic field shaping component for shaping a magnetic field produced by a current in the first conductor, and a MEMS-based magnetic field sensing component including a magneto-MEMS component for sensing the shaped magnetic field and, in response thereto, providing an indication of the current in the first conductor. A method for sensing a current using MEMS is also described as including shaping a magnetic field produced with a current in a first conductor, sensing the shaped magnetic field with a MEMS-based magnetic field sensing component having a magneto-MEMS component magnetic field sensing circuit, and providing an indication of the current in the first conductor.