发明申请
- 专利标题: Sensor head, gas sensor and sensor unit
- 专利标题(中): 传感器头,气体传感器和传感器单元
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申请号: US10550737申请日: 2004-03-26
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公开(公告)号: US20070041870A1公开(公告)日: 2007-02-22
- 发明人: Kazushi Yamanaka , Noritaka Nakaso , Nobuo Takeda
- 申请人: Kazushi Yamanaka , Noritaka Nakaso , Nobuo Takeda
- 申请人地址: JP Sendai-shi, Miyagi 981-3134 JP Tokyo 110-0016 JP Nagareyama-shi, Chiba 270-0163
- 专利权人: Kazushi Yamanaka,Toppan Printing Co., Ltd.,Ball Semiconductor Ltd.
- 当前专利权人: Kazushi Yamanaka,Toppan Printing Co., Ltd.,Ball Semiconductor Ltd.
- 当前专利权人地址: JP Sendai-shi, Miyagi 981-3134 JP Tokyo 110-0016 JP Nagareyama-shi, Chiba 270-0163
- 优先权: JP2003-086468 20030326
- 国际申请: PCT/JP04/04315 WO 20040326
- 主分类号: G01N31/22
- IPC分类号: G01N31/22
摘要:
The present invention includes a three-dimensional base body (40) having a curved surface allowing definition of a circular orbital band (B), an electroacoustic transducer (21) arranged on the orbital band (B) of the three-dimensional base body (40) and configured to excite surface acoustic wave to perform multiple roundtrips along the orbital band (B), and a sensitive film (25) formed on at least a part of the orbital band (B) of the three-dimensional base body (40) and configured to react with a specific gas molecule. The surface acoustic wave experienced the multiple roundtrips along the orbital band (B) is then converted into a high frequency electric signal again by an interdigital transducer (21). The resulting high frequency electric signal is transferred to a detection/output unit (24) via a switching unit (23) and then detected by the detection/output unit (24).
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