发明申请
US20070046221A1 METHOD FOR CONTROLLING STAGE APPARATUS 失效
控制装置的方法

METHOD FOR CONTROLLING STAGE APPARATUS
摘要:
At least one exemplary embodiment is directed to a control method for controlling a stage apparatus including a base and a stage, the base including first and second coil phases, the stage including a plurality of magnets. The control method includes a first energization step of rotating the stage to a stable angle by contemporaneously energizing a plurality of coils comprising the first coil phase and a second energization step of rotating the stage to a stable angle by sequentially energizing coils comprising the second coil phase one by one.
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