发明申请
- 专利标题: METHOD FOR CONTROLLING STAGE APPARATUS
- 专利标题(中): 控制装置的方法
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申请号: US11462383申请日: 2006-08-04
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公开(公告)号: US20070046221A1公开(公告)日: 2007-03-01
- 发明人: Takahiro Miyakawa
- 申请人: Takahiro Miyakawa
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2005-247663 20050829
- 主分类号: H02K41/00
- IPC分类号: H02K41/00 ; H02P1/00
摘要:
At least one exemplary embodiment is directed to a control method for controlling a stage apparatus including a base and a stage, the base including first and second coil phases, the stage including a plurality of magnets. The control method includes a first energization step of rotating the stage to a stable angle by contemporaneously energizing a plurality of coils comprising the first coil phase and a second energization step of rotating the stage to a stable angle by sequentially energizing coils comprising the second coil phase one by one.
公开/授权文献
- US07436135B2 Method for controlling stage apparatus 公开/授权日:2008-10-14
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