Invention Application
- Patent Title: System and method for modulation mapping
- Patent Title (中): 调制映射的系统和方法
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Application No.: US11438121Application Date: 2006-05-18
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Publication No.: US20070046301A1Publication Date: 2007-03-01
- Inventor: Steven Kasapi
- Applicant: Steven Kasapi
- Applicant Address: US CA Milpitas
- Assignee: CREDENCE SYSTEMS CORPORATION
- Current Assignee: CREDENCE SYSTEMS CORPORATION
- Current Assignee Address: US CA Milpitas
- Main IPC: G01R31/305
- IPC: G01R31/305

Abstract:
An apparatus for providing modulation mapping is disclosed. The apparatus includes a laser source, a motion mechanism providing relative motion between the laser beam and the DUT, signal collection mechanism, which include a photodetector and appropriate electronics for collecting modulated laser light reflected from the DUT, and a display mechanism for displaying a spatial modulation map which consists of the collected modulated laser light over a selected time period and a selected area of the IC.
Public/Granted literature
- US07733100B2 System and method for modulation mapping Public/Granted day:2010-06-08
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