发明申请
US20070048448A1 Patterning method using coatings containing ionic components
审中-公开
使用含有离子组分的涂层的图案化方法
- 专利标题： Patterning method using coatings containing ionic components
- 专利标题（中）： 使用含有离子组分的涂层的图案化方法
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申请号： US11504107申请日： 2006-08-15
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公开(公告)号： US20070048448A1公开(公告)日： 2007-03-01
- 发明人: Dae Kim , Ji Kim , Dong Shin , Dong Choi , Kyung Choi , Ho Ji , Geun Cha , Sung Kim
- 申请人： Dae Kim , Ji Kim , Dong Shin , Dong Choi , Kyung Choi , Ho Ji , Geun Cha , Sung Kim
- 优先权： KR2005-0075193 20050817
- 主分类号： B05D3/12
- IPC分类号： B05D3/12
摘要：
Disclosed is a method of forming a pattern by means of coatings containing an ionic component having a positive or negative electric charge using electrostatic attraction force and/or repulsion force. In the method, it is possible to significantly improve precision and efficiency of the pattern formation.