发明申请
- 专利标题： In-line filter in a diffusion bonded layered substrate
- 专利标题（中）： 扩散接合层叠基板中的在线滤波器
-
申请号： US11542829申请日： 2006-10-03
-
公开(公告)号： US20070051080A1公开(公告)日： 2007-03-08
- 发明人: Mark Crockett , John Lane , Michael DeChellis , Chris Melcer , Erica Porras , Aneesh Khullar , Balarabe Mohammed
- 申请人： Mark Crockett , John Lane , Michael DeChellis , Chris Melcer , Erica Porras , Aneesh Khullar , Balarabe Mohammed
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 主分类号： B01D50/00
- IPC分类号： B01D50/00
摘要：
A space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The invention pertains to a diffusion bonded integrated fluid flow network architecture, which includes, in addition to a layered substrate containing fluid flow channels, an in-line filter and may include various fluid handling and monitoring components. The integrated fluid delivery system that is formed from a layered substrate is diffusion bonded, and the various fluid handling and monitoring components may be partially integrated or fully integrated into the substrate, depending on design and material requirements.
公开/授权文献
- US07459003B2 In-line filter in a diffusion bonded layered substrate 公开/授权日：2008-12-02
信息查询
