发明申请
- 专利标题: Method of manufacturing nano crystals and application of the same
- 专利标题(中): 制造纳米晶体的方法及其应用
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申请号: US11320061申请日: 2005-12-28
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公开(公告)号: US20070052004A1公开(公告)日: 2007-03-08
- 发明人: Chih-Wei Chao , Mao-Yi Chang , I-Chang Tsao
- 申请人: Chih-Wei Chao , Mao-Yi Chang , I-Chang Tsao
- 专利权人: AU Optronics Corp.
- 当前专利权人: AU Optronics Corp.
- 优先权: TW94130426 20050905
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
A method of manufacturing nano crystals disclosed herein is applicable to the fabrications of memory device and solar cell. The method of manufacturing nano crystals at least comprises steps of: providing a substrate with a thin film formed thereon, and transforming the thin film into the nano crystals by laser annealing, wherein a thickness of the thin film is equal to or less than about 50 Å, and a wavelength of the laser selected for laser annealing is equal to or less than about 500 nm.
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