发明申请
- 专利标题： Alignment checking structure and process using thereof
- 专利标题（中）： 对准检查结构及其使用方法
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申请号： US11221486申请日： 2005-09-07
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公开(公告)号： US20070052114A1公开(公告)日： 2007-03-08
- 发明人: Shih-Chieh Huang , Chang-Ming Liu , Bob Lee
- 申请人： Shih-Chieh Huang , Chang-Ming Liu , Bob Lee
- 主分类号： H01L23/544
- IPC分类号： H01L23/544
摘要：
The invention provides an alignment checking structure with a checkered pattern comprising a plurality of metal squares and a plurality of non-metal squares that are arranged in alternation, in a first direction and a second direction, and the first direction is perpendicular to the second direction
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