- 专利标题: Method of manufacturing nozzle plate
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申请号: US11514898申请日: 2006-09-05
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公开(公告)号: US20070054221A1公开(公告)日: 2007-03-08
- 发明人: Tsutomu Yokouchi
- 申请人: Tsutomu Yokouchi
- 专利权人: FUJI PHOTO FILM CO., LTD.
- 当前专利权人: FUJI PHOTO FILM CO., LTD.
- 优先权: JP2005-257757 20050906
- 主分类号: G03C5/00
- IPC分类号: G03C5/00
摘要:
The method manufactures a nozzle plate including a nozzle having a tapered section where a diameter gradually decreases from a liquid supply side toward a liquid ejection side, and a straight section which is substantially cylindrical and is situated nearer a liquid ejection side of the tapered section. The method comprises the steps of: forming a first photosensitive material in a form of a layer on a substrate; placing a straight section forming member including a hole section having a shape substantially corresponding to a shape of the straight section, on the first photosensitive material; filling a second photosensitive material into the hole section; radiating a prescribed light toward the straight section forming member, in such a manner that substantially all of the second photosensitive material is exposed and the first photosensitive material is exposed in a tapered shape having a diameter which gradually increases toward the substrate; removing the straight section forming member from the first photosensitive material and the second photosensitive material; carrying out development of the first photosensitive material and the second photosensitive material after removing the straight section forming member from the first photosensitive material and the second photosensitive material; forming a metal layer which is to serve as the nozzle plate, on the substrate, by a plating method where the first photosensitive material and the second photosensitive material left on the substrate after carrying out the development of the first photosensitive material and the second photosensitive material are used as a mold; and removing the metal layer from the substrate, the first photosensitive material and the second photosensitive material.
公开/授权文献
- US07255977B2 Method of manufacturing nozzle plate 公开/授权日:2007-08-14
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