发明申请
- 专利标题： Superconducting structure, apparatus for processing superconducting structure, and method for processing superconducting structure
- 专利标题（中）： 超导结构，超导结构处理装置及超导结构处理方法
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申请号： US11217358申请日： 2005-09-02
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公开(公告)号： US20070054809A1公开(公告)日： 2007-03-08
- 发明人: Akira Kawakami
- 申请人： Akira Kawakami
- 申请人地址： JP Tokyo
- 专利权人： National Institute of Information and Communications Tech., Inc. Administrative Agency
- 当前专利权人： National Institute of Information and Communications Tech., Inc. Administrative Agency
- 当前专利权人地址： JP Tokyo
- 主分类号： H01L39/24
- IPC分类号： H01L39/24
摘要：
A superconducting structure includes an NbN thin-film as a first superconducting thin-film layer on the upper surface of a substrate, an NbN thin-film as a second superconducting thin-film layer above the NbN thin-film, and a MgO thin-film as a protective thin-film provided between the NbN thin-film and the NbN thin-film.
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