Invention Application
- Patent Title: SUBSTRATE CARRIER HANDLER THAT UNLOADS SUBSTRATE CARRIERS DIRECTLY FROM A MOVING CONVEYOR
- Patent Title (中): 底盘搬运车从移动式输送机直接卸载底架
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Application No.: US11555240Application Date: 2006-10-31
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Publication No.: US20070061042A1Publication Date: 2007-03-15
- Inventor: Michael Rice , Martin Elliott , Robert Lowrance , Jeffrey Hudgens , Eric Englhardt
- Applicant: Michael Rice , Martin Elliott , Robert Lowrance , Jeffrey Hudgens , Eric Englhardt
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Main IPC: G06F19/00
- IPC: G06F19/00

Abstract:
In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. Numerous other aspects are provided.
Public/Granted literature
- US07346431B2 Substrate carrier handler that unloads substrate carriers directly from a moving conveyer Public/Granted day:2008-03-18
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