发明申请
- 专利标题： Multi-source method and system for forming an oxide layer
- 专利标题（中）： 用于形成氧化物层的多源方法和系统
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申请号： US11231336申请日： 2005-09-21
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公开(公告)号： US20070065593A1公开(公告)日： 2007-03-22
- 发明人: Cory Wajda , David O'Meara , Masanobu Igeta
- 申请人： Cory Wajda , David O'Meara , Masanobu Igeta
- 主分类号： B05D3/00
- IPC分类号： B05D3/00 ; H05H1/24
摘要：
A method for preparing an oxide film on a substrate. A surface of a substrate is oxidized to form an oxide film. The surface is exposed to oxygen radicals formed by ultraviolet (UV) radiation induced dissociation and plasma induced dissociation of a process gas comprising at least one molecular composition comprising oxygen.
公开/授权文献
- US2142211A Method of casting 公开/授权日：1939-01-03