发明申请
- 专利标题: Method for producing a lithium microbattery
- 专利标题(中): 锂微电池的制造方法
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申请号: US10576511申请日: 2004-11-04
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公开(公告)号: US20070067984A1公开(公告)日: 2007-03-29
- 发明人: Frederic Gaillard , Marc Plissonnier , Raphael Salot , Stephanie Roche
- 申请人: Frederic Gaillard , Marc Plissonnier , Raphael Salot , Stephanie Roche
- 优先权: FR0313325 20031114
- 国际申请: PCT/FR04/02842 WO 20041104
- 主分类号: H01M10/04
- IPC分类号: H01M10/04
摘要:
During the production of a lithium microbattery, the electrolyte containing a lithiated compound is formed by successively depositing an electrolytic thin film, a first protective thin film that is chemically inert in relation to the lithium, and a first masking thin film on a substrate provided with current collectors and a cathode. A photolithography step is carried out on the first masking thin film in order to create a mask for selectively etching the first masking thin layer, and the first protective thin layer and the electrolytic thin film are then selectively etched in such a way as to form the electrolyte in the electrolytic thin film. This technique enables the electrolyte to be formed by photolithography and etching without causing any damage thereto.
公开/授权文献
- US07695531B2 Method for producing a lithium microbattery 公开/授权日:2010-04-13
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