发明申请
US20070069429A1 System and method for patterning a master disk for nanoimprinting patterned magnetic recording disks 审中-公开
用于图案化用于纳米压印图案化磁记录盘的母盘的系统和方法

System and method for patterning a master disk for nanoimprinting patterned magnetic recording disks
摘要:
A system and method for patterning a master disk or “stamper” to be used for nanoimprinting magnetic recording disks uses an air-bearing slider that supports an aperture structure within the optical near-field of a resist layer on a rotating master disk substrate. Laser pulses directed to the input side of the aperture are output to the resist layer. The aperture structure includes a metal film reflective to the laser radiation with the aperture formed in it. The aperture has a size less than the wavelength of the incident laser radiation and is maintained by the air-bearing slider near the resist layer to within the radiation wavelength. The timing of the laser pulses is controlled to form a pattern of exposed regions in the resist layer, with this pattern ultimately resulting in the desired pattern of data islands and nondata islands in the magnetic recording disks when they are nanoimprinted by the master disk.
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