Invention Application
US20070074579A1 Wireless pressure sensor and method of forming same 审中-公开
无线压力传感器及其形成方法

Wireless pressure sensor and method of forming same
Abstract:
A pressure sensor system includes a pressure sensing capacitor and an inductor integrated in a substrate. The pressure sensing capacitor includes a conductive diaphragm for detecting a pressure differential and an electrode separated from the diaphragm by a predetermined gap formed in the substrate. The inductor and pressure sensing capacitor form a passive inductive-capacitive (LC) tank circuit. A remote interrogation circuit, inductively coupled to the pressure sensor inductor coil, can be utilized to detect changes in resonant frequency of the LC tank wirelessly. The fully integrated pressure sensor structure is manufactured utilizing layer-by-layer fabrication techniques.
Public/Granted literature
Information query
Patent Agency Ranking
0/0