Invention Application
US20070075258A1 Electrostatic deflector 有权
静电导流板

  • Patent Title: Electrostatic deflector
  • Patent Title (中): 静电导流板
  • Application No.: US11528942
    Application Date: 2006-09-28
  • Publication No.: US20070075258A1
    Publication Date: 2007-04-05
  • Inventor: Kazuya Goto
  • Applicant: Kazuya Goto
  • Applicant Address: JP Akishima 196-8558
  • Assignee: JEOL Ltd.
  • Current Assignee: JEOL Ltd.
  • Current Assignee Address: JP Akishima 196-8558
  • Priority: JP2005-290864 20051004
  • Main IPC: H01J37/147
  • IPC: H01J37/147
Electrostatic deflector
Abstract:
There is disclosed an electrostatic deflector having four pillar-like identical electrodes spaced from each other by 90°. An even number of pillar-like electrodes are disposed in each space between the four electrodes. Spaces are formed on both sides of each one of the first electrodes and have bent portions. The even number of electrodes are arranged symmetrically relative to a third or fourth vertical plane including an axis spaced from the X-axis by 45° or −45°, respectively. Holes are formed across each of the third and fourth vertical planes. Rod-like members are inserted in the holes.
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