Invention Application
- Patent Title: Metal interconnection lines of semiconductor devices and methods of forming the same
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Application No.: US11633697Application Date: 2006-12-04
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Publication No.: US20070075429A1Publication Date: 2007-04-05
- Inventor: Jae-Suk Lee
- Applicant: Jae-Suk Lee
- Priority: KR10-2003-0090328 20031211
- Main IPC: H01L23/52
- IPC: H01L23/52

Abstract:
Metal interconnection lines of semiconductor devices and methods of forming the same are disclosed. Improved reliability is achieved in a disclosed metal line of a semiconductor device by preventing metal layers from eroding and preventing metal lines from being destroyed due to electro-migration (EM) and stress-migration (SM). An illustrated metal interconnection line includes: a semiconductor substrate; a metal pattern on the substrate; a glue pattern under the metal pattern; an anti-reflection pattern on the metal pattern; and dummy patterns surrounding side walls of the metal pattern.
Public/Granted literature
- US07514793B2 Metal interconnection lines of semiconductor devices and methods of forming the same Public/Granted day:2009-04-07
Information query
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