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Invention Application
US20070078048A1 Glass composition exclusively consisting of oxides which already at low temperatures form volatile fluorides by reaction with fluorine and its use 失效
由低温氧化物组成的玻璃组合物通过与氟反应形成挥发性氟化物及其用途

Glass composition exclusively consisting of oxides which already at low temperatures form volatile fluorides by reaction with fluorine and its use
Abstract:
The glass is advantageous for microstructuring, especially reactive ion etching with fluorine and fluorine compounds, and has a glass composition based on oxide content and expressed in mol % of: SiO2, 40-70; GeO2, 0-30; B2O3, 5-20; P2O5, 5-20; WO3, 0-10; As2O3, 0-10; Yb2O3, 0-5; and Lu2O3, 0-5. Microstructure components, such as micro arrays, Fresnel lenses, micro wafers, or micro lens wafers, made by a method including reactive ion etching from the glass are also part of the present invention.
Abstract(Chinese):

该玻璃有利于微结构化，特别是氟和氟化合物的反应离子蚀刻，并且具有基于氧化物含量并以摩尔％表示的玻璃组合物：SiO 2，40-70; GeO 2，0-30; B 2 O 3，5-20; P 5 5，5-20; WO 3，0-10; 作为2 3，0-10; Yb 2 O 3，0-5; 和Lu 2 O 3，0-5。 通过包括从玻璃进行反应离子蚀刻的方法制造的微结构组件，例如微阵列，菲涅耳透镜，微晶片或微透镜晶片也是本发明的一部分。

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