发明申请
US20070082279A1 Near-field exposure method and device manufacturing method using the same
审中-公开
近场曝光方法及使用其的装置制造方法
- 专利标题: Near-field exposure method and device manufacturing method using the same
- 专利标题(中): 近场曝光方法及使用其的装置制造方法
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申请号: US10554994申请日: 2005-06-30
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公开(公告)号: US20070082279A1公开(公告)日: 2007-04-12
- 发明人: Natsuhiko Mizutani , Ryo Kuroda
- 申请人: Natsuhiko Mizutani , Ryo Kuroda
- 申请人地址: JP Tokyo
- 专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人: CANON KABUSHIKI KAISHA
- 当前专利权人地址: JP Tokyo
- 优先权: JP2004-194820 20040630
- 国际申请: PCT/JP05/12528 WO 20050630
- 主分类号: G03F7/20
- IPC分类号: G03F7/20
摘要:
Disclosed is a near-field exposure method including a process of bringing a light blocking film with a plurality of small openings each having an opening width not greater than a wavelength of exposure light, into close contact with a photoresist layer provided on a surface of a substrate, and a process of projecting exposure light from an exposure light source to the light blocking film to transfer an opening pattern of the light blocking film to the photoresist layer, wherein, on the basis of a correlation between (a) a distance from a node of a standing wave to be produced in the photoresist layer to the light blocking film and (b) a light intensity distribution of near-field light to be produced in the photoresist layer adjacent the light blocking film, the distance from the standing wave node to the light blocking film is determined so as to provide a desired light intensity distribution.
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