发明申请
- 专利标题： Apparatus for block assembly process
- 专利标题（中）： 块装配工艺装置
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申请号： US11546109申请日： 2006-10-10
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公开(公告)号： US20070082464A1公开(公告)日： 2007-04-12
- 发明人: Kenneth Schatz , Gordon Craig , Cornelius Sutu , John Smith , Samuel Robillos , Omar Alvarado , Ming Chan , Steve Harrington
- 申请人： Kenneth Schatz , Gordon Craig , Cornelius Sutu , John Smith , Samuel Robillos , Omar Alvarado , Ming Chan , Steve Harrington
- 主分类号： H01L21/30
- IPC分类号： H01L21/30 ; H01L21/46
摘要：
Apparatuses and methods for improved fluidic self assembly (FSA). An apparatus performing an improved FSA method can include one or more of a block deposition and clearing section, a drying section, a lamination section and an inspection section. In a specific embodiment, each of these sections are connected in series but distinctly separate. The deposition and clearing section can additionally include dispenser nozzles, rolling pins, and a cross-flow jet pump nozzle, as well as other components.
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