发明申请
- 专利标题: Stabilization apparatus for movable mirror
- 专利标题(中): 可移动镜的稳定装置
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申请号: US11340493申请日: 2006-01-27
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公开(公告)号: US20070085445A1公开(公告)日: 2007-04-19
- 发明人: Kenji Rikimaru , Yuji Ishii , Kazuyuki Mori
- 申请人: Kenji Rikimaru , Yuji Ishii , Kazuyuki Mori
- 申请人地址: JP Kawasaki
- 专利权人: FUJITSU LIMITED
- 当前专利权人: FUJITSU LIMITED
- 当前专利权人地址: JP Kawasaki
- 优先权: JP2005-299569 20051014
- 主分类号: G02B26/08
- IPC分类号: G02B26/08 ; G02B26/00 ; H02N1/00
摘要:
A stabilization apparatus according to the present invention comprises a stopper which is in contact under pressure with one side face of a movable body capable of swinging around a torsion bar, this one side face being vertical to an axial direction of the movable body, to damp the movable body. The stopper is displaced between a first position at which the stopper is in contact under pressure with the side face of the movable body, and a second position apart from the side face, according to a drive voltage applied to a stopper electrode. The drive voltage for the stopper electrode is controlled by a control section at the appropriate timing according to a drive condition of the movable body. As a result, the resonance operation can be reliably suppressed even when an angle of the movable mirror is changed at a high speed, and thus, it becomes possible to stabilize the movable mirror to be in a desired state in a short time.
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