发明申请
US20070085445A1 Stabilization apparatus for movable mirror 审中-公开
可移动镜的稳定装置

Stabilization apparatus for movable mirror
摘要:
A stabilization apparatus according to the present invention comprises a stopper which is in contact under pressure with one side face of a movable body capable of swinging around a torsion bar, this one side face being vertical to an axial direction of the movable body, to damp the movable body. The stopper is displaced between a first position at which the stopper is in contact under pressure with the side face of the movable body, and a second position apart from the side face, according to a drive voltage applied to a stopper electrode. The drive voltage for the stopper electrode is controlled by a control section at the appropriate timing according to a drive condition of the movable body. As a result, the resonance operation can be reliably suppressed even when an angle of the movable mirror is changed at a high speed, and thus, it becomes possible to stabilize the movable mirror to be in a desired state in a short time.
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