发明申请
US20070085615A1 Tuning fork shaped crystal oscillator and method of fabrication thereof 审中-公开
调谐叉形晶体振荡器及其制造方法

  • 专利标题: Tuning fork shaped crystal oscillator and method of fabrication thereof
  • 专利标题(中): 调谐叉形晶体振荡器及其制造方法
  • 申请号: US11637656
    申请日: 2006-12-12
  • 公开(公告)号: US20070085615A1
    公开(公告)日: 2007-04-19
  • 发明人: Hideryo MatsudoJun Katase
  • 申请人: Hideryo MatsudoJun Katase
  • 优先权: JP2003-333033 20030925
  • 主分类号: H03B5/30
  • IPC分类号: H03B5/30
Tuning fork shaped crystal oscillator and method of fabrication thereof
摘要:
The present invention provides a tuning fork shaped oscillator, an angular velocity sensor element, and an angular velocity sensor with improved breaking strength with respect to CI and drive power, CI stability, and frequency stability. The present invention relates to a tuning fork shaped crystal oscillator of a configuration wherein two tuning fork shaped crystal elements that have been formed by wet etching during the process of forming the external shape of a tuning fork, in such a manner that the longitudinal direction of the tuning fork is aligned on the Y-axis of the crystalline axes (XYZ) and also the lateral direction thereof is aligned on the X-axis, are bonded together with the ±X-axis directions thereof oriented in opposite directions; and the right side surface of each of the two tuning fork shaped crystal elements is the +X face of the crystal when the two tuning fork shaped crystal elements are viewed in an upright attitude.
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