发明申请
- 专利标题: Method and mesh reference structures for implementing Z-axis cross-talk reduction through copper sputtering onto mesh reference planes
- 专利标题(中): 用于通过铜溅射实现Z轴串扰降低的网格参考平面的方法和网格参考结构
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申请号: US11250043申请日: 2005-10-13
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公开(公告)号: US20070087556A1公开(公告)日: 2007-04-19
- 发明人: Roger Booth , Matthew Doyle
- 申请人: Roger Booth , Matthew Doyle
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L21/4763
- IPC分类号: H01L21/4763 ; H01L21/44
摘要:
A method and mesh reference applications are provided for implementing Z-axis cross-talk reduction. A mesh reference plane including a grid of mesh traces is formed with the mesh traces having selected thickness and width dimensions effective for reference current-flow distribution. An electrically conductive coating is deposited to fill the mesh electrical holes in the mesh reference plane to reduce cross-talk, substantially without affecting mechanical flexibility.