发明申请
- 专利标题: Gas flow measuring apparatus
- 专利标题(中): 气体流量计
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申请号: US11483549申请日: 2006-07-11
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公开(公告)号: US20070089504A1公开(公告)日: 2007-04-26
- 发明人: Keiji Hanzawa , Satoshi Shimada , Akio Yasukawa , Naoki Saito , Keiichi Nakada , Izumi Watanabe
- 申请人: Keiji Hanzawa , Satoshi Shimada , Akio Yasukawa , Naoki Saito , Keiichi Nakada , Izumi Watanabe
- 优先权: JP2005-204620 20050713
- 主分类号: G01F1/68
- IPC分类号: G01F1/68
摘要:
A gas flow measuring apparatus includes a detecting element including a heating resistor and a thermo-sensitive resistor disposed on a diaphragm and external terminals connected to the heating resistor and the thermo-sensitive resistor, and a flow rate detecting unit which controls heating temperature of the heating resistor and which detects a flow rate of gas according to a change in a resistance value of the heating resistor or the thermo-sensitive resistor. The detecting element includes a resistor area in which the heating resistor and the thermo-sensitive resistor are formed and a fixed section area in which the external terminals are formed. A stress mitigating unit is formed between the resistor area and the fixed section area.
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